Cleanroom, hook-up, tool install
Commissioning software for fabs where tool install depends on twelve facility systems.
A fab is a facility project and a tool installation programme running at the same time. Deskely tracks cleanroom, ultrapure water, bulk and specialty gases, exhaust, chilled water and power as subsystems, and every tool hook-up as an asset that depends on them.
- Facility
- UPW, gases, exhaust, power
- Unit
- Tool and hook-up
- Constraint
- Cleanroom protocol
- Gate
- Tool release to process
Choose your project type
The problem
Tool install waits on facilities, and nobody agrees on which ones.
Each tool needs a specific combination of bulk and specialty gases, UPW, exhaust and abatement, chilled water, vacuum and power. The facility contractor knows its systems; the tool vendor knows its tool; nobody holds the intersection until hook-up day.
The result is tools delivered into a bay that cannot yet support them, and hook-up crews standing idle.
Deskely holds tool-level utility dependencies against facility subsystems, so bay readiness is a query rather than a meeting.
Setting up the register
Facility systems and tools live in the same register.
Ultrapure water, bulk gases, specialty gases, exhaust and abatement, process cooling, vacuum and power are subsystems with their own record sets and completion paths.
Tools are assets with hook-up scopes beneath them: connections, interlocks, monitoring and safety devices, each tagged and tested.
Drawings and schedules are parsed into that structure so no one maintains parallel lists.
Execution
Hook-up and verification recorded under cleanroom protocol.
Field capture on tablets suits gowned work far better than paper: forms are completed at the tool, with photos and measured values where they matter.
Leak checks, purity results, interlock tests and safety verifications are held against the tool and its connections.
Punch is categorised by whether it blocks tool release, so the hook-up queue is prioritised by consequence.
Tool release
A tool is released to process when its dependencies are signed.
Release depends on facility subsystems being available and the hook-up record set being complete, both enforced from the data.
The evidence pack per tool goes to the process organisation with the installation history intact.
That pack is also what supports later moves, upgrades and requalification.
Particle and contamination control
A tool can be mechanically and electrically complete and still fail release because the bay cannot hold its particle count.
Fab acceptance carries a test category that has no equivalent on a conventional production line: airborne particle counts have to be demonstrated at the tool footprint under as-built, as-occupied conditions, and a single non-conformance can trace back to a sealant, a filter, or a gowning breach months after the tool was mechanically signed off.
UPW resistivity, TOC and particle count, and specialty gas purity, all have to be proven at the point of use — at the tool's own connection — not just at the distribution header, because a clean header feeding a contaminated drop line is functionally no different to no UPW system at all.
Deskely holds particle count results, UPW point-of-use verification and specialty gas purity records against the specific tool connection they qualify, alongside the mechanical hook-up records, so a release decision is made against the full contamination-control picture rather than the mechanical checklist alone.
How it runs
From base build to tools running process.
Fab schedules are dominated by dependency management, which is exactly what a structured register is for.
- 01
Model facility subsystems
UPW, bulk and specialty gases, exhaust, process cooling, vacuum and power as separate paths.
- 02
Register tools and hook-ups
Each tool tagged with its connections, interlocks, monitoring and safety devices.
- 03
Map utility dependencies
Tool-level prerequisites recorded against facility subsystems to make bay readiness explicit.
- 04
Execute gowned on tablet
Hook-up, leak, purity and interlock checks captured at the tool under cleanroom protocol.
- 05
Categorise punch by release
Items marked as blocking tool release or not, with owners and dates.
- 06
Release tools with evidence
Release certificates issued from signed records, with a per-tool pack handed to process.
FAQ
Questions about Semiconductor fabs scopes.
Keep reading
Manufacturing commissioning
The full sector view: asset registers, FAT and SAT evidence, punch lists and line acceptance.
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Pre-SAT and pre-acceptance inspections run as structured walks that raise punch on the spot.
Read moreAI drawing parser
Layouts, equipment lists and I/O schedules turned into a reviewed asset register.
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